S. Koelling¹, S. Assali¹, A. Li¹, A. Cavalli¹, S. Gazibegovic^1,2, D. Car^1,2, H.I.T. Hauge¹, M. Verheijen^1,3, S. Conesa-Boj², S. Agarwal⁴, S. Bertazzo⁵, A.J. Fijneman⁶, H. King⁷, O. Pluemper⁷, N.A.J.M. Sommerdijk⁶, M.M. Stevens⁴, E.P.A.M. Bakkers^1,2 & P.M. Koenraad¹

¹ Department of Applied Physics, Eindhoven University of Technology, Netherlands
² QuTech and Kavli Institute of NanoScience, Delft University of Technology, Netherlands
³ Philips Innovation Services Eindhoven, Netherlands
⁴ Department of Materials, Imperial College London, United Kingdom
⁵ Department of Medical Physics & Biomedical Engineering, University College London, United Kingdom
⁶ Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands
⁷ Department of Earth Sciences, Utrecht University, Netherlands

Atomic-scale metrology has become a routine tool in semiconductor science and technology. It is utilized regularly to support the development of new materials, supervise processes and investigate device failures. Most recently, the industry adopted Atom Probe Tomography (APT) as a new way to make atomic-scale analysis and complement Electron Microscopy (SEM, TEM) and Scanning Probe Microscopy (AFM, STM). APT allows to extract the three-dimensional elemental distribution from a region of interest on the nanometer scale. APT is utilized to detect and map the spatial distribution of a small number of atoms or small concentration fluctuations near interfaces or in nanometer-sized volumes.

These properties make APT interesting for applications in the life sciences where it could unravel the structure of hierarchical materials on the nanoscale, determine the elemental make-up of interfaces between organics and minerals or natural materials and artificial implants, or image the position of proteins inside complex structures. Here we will discuss the state-of-the-art in analyzing biologically relevant materials using APT. We will point out the potential of the technique and highlight shortcomings and pitfalls that make the application of APT to materials relevant in the life sciences challenging.