Hans Butler
Department / Institute
RESEARCH PROFILE
Hans Butler is a part-time professor in the Control Systems group of the Department of Electrical Engineering at Eindhoven University of Technology. He specializes in lithographic scanner control, an area of expertise he has built through a long career at ASML, where he is also a Fellow. Butler is a specialist in dynamics and control systems.
As a control engineer, Butler has worked at ASML on multiple components of lithographic tools, such as handlers, illuminators, projection systems and stages. Within ASML's Mechatronic Systems Development Department, he has led groups working on actuators, opto-mechatronics, and vibration isolation and damping. Butler is an ASML fellow with dynamics and control as main focus area, in particular in relation to the imaging process. Improving the positioning accuracy from a perspective of dynamics and control has always been the guiding interest throughout his career.
The complexity of a lithographic tool, in our field requiring sub-nanometer positioning accuracy while exerting thousands of Newtons, continues to amaze. Its success requires teamwork of people in all disciplines.
ACADEMIC BACKGROUND
Hans Butler holds an MSc (1986) and PhD (1990) degree from Delft University of Technology. In 1991, he joined ASML, where he has led groups working on actuators, opto-mechatronics, dynamics, vibration isolation and damping. In 2002, he became group leader of the Drives group, moving to the System Dynamics group in 2006. In 2010, Butler became an ASML fellow. In 2012 he was appointed part-time professor in Lithographic Scanner Control at Eindhoven University of Technology.
Recent Publications
-
M. Bolderman,Mircea Lazar,Hans Butler
Physics–Guided Neural Networks for Feedforward Control
(2023) -
Y.L.C. Broens,Hans Butler,Roland Tóth
On modal observers for beyond rigid body H∞ control in high-precision mechatronics
arXiv (2022) -
Y.L.C. Broens,Hans Butler,Roland Tóth
LPV sequential loop closing for high-precision motion systems
(2022) -
M. Bolderman,Mircea Lazar,Hans Butler
On feedforward control using physics-guided neural networks: Training cost regularization and optimized initialization
(2022) -
M. Bolderman,M. Lazar,H. Butler
Generalized feedforward control using physics-informed neural networks
IFAC-PapersOnLine (2022)
Current Educational Activities
Ancillary Activities
- My full (paid) job: Dynamics & Control architect as a fellow, ASML EUV Mechatronic Systems Development